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Brion Technologies Overview

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Brion provides innovative products and services that will fundamentally improve the manufacturing economics of the global semiconductor industry. An interrelated set of challenges in lithography - the process of transferring circuit design patterns onto silicon wafers - threatens to derail the semiconductor industry from its historical paths of technology improvement and economic growth. The...More»

4211 Burton Drive Santa Clara, CA 95054 Map it »
408-653-1500
2002
Semiconductors
Corporation
Private

Products

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Name:LithoCruiser
Product URL:http://www.briontech.com/LithoCruiser_summary.asp
Description:LithoCruiser is the industry's only integrated software suite for low-k1 lithography optimization.

LithoCruiser analyzes and optimizes the most advanced scanner performance (including hyper-NA, immersion and polarization) and mask design simultaneously. It can be easily used to develop new lithography processes and optimize existing processes at the design, photomask and imaging levels.

LithoCruiser is tightly integrated with ASML's leading-edge scanners, enabling relevant information
such as actual illumination profiles and volume manufacturing effects to be used in the analysis and
optimization of wafer imaging performance. LithoCruiser is targeted for use by lithography technology
development organizations of semiconductor manufacturers.

Complete Low-k1 Solution Path

LithoCruiser enables users to develop, characterize and optimize the entire pre-production process,
from mask design to wafer imaging-without producing a single mask or exposing a single wafer.

Scanner and Mask Optimization

Several powerful functions are offered for automatic optimization of NA/sigma, illumination shape and
OPC. Optimization is performed by taking into account proprietary ASML scanner specifications, thus
producing manufacturable results. Additionally, multiple simulations and optimizations can be set up
and sequenced for more in-depth metric-based analysis and scanner comparisons.

ASML Scanner Database

LithoCruiser's database includes specific available illumination conditions for ASML's advanced scanner platforms, as well as Jones Pupil, DOE data files, and lens models to reflect varying manufacturing conditions.

Highly Accurate and Tunable Resist Models

LithoCruiser includes the most advanced 3D lumped parameter model(LPM) and ¡°full physical¡± resist models, which can be calibrated through focus and exposure, providing highly accurate process analyses and optimized settings.

Ease of Use

The state-of-the-art graphical user-interface (GUI) allows intuitive entry of process parameters and provides easy access to lithography process actions.

Open Access Platform

A powerful Applications Programming Interface (API) enables users to build their own customized set of analysis and optimization applications.
Screenshots: LithoCruiser product

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